Type in one of the colloquial names for the machine to get to today's scheduling page.
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Official CNF Name:
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Valid Xarph Name(s):
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Mann PG Pattern Generator
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PG, Mann, Mann PG
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10x i-line Stepper
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10x, 10x Stepper, Stepper
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5x g-line Stepper
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5x, 5x Stepper
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HTG Contact Aligner
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HTG, Contact Aligner
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Karl Suss MA6
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Suss, Karl Suss, MA6
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CEE 6000 Spin Coater
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CEE 6000, Spin Coater, Spinner
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YES Oven
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Yes, Yes Oven
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EBMF E-Beam
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EBMF
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Leica VB6 E-Beam
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VB6, Leica VB6
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Leo DSM 982 SEM #1
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Leo, Leo 1, Leo #1, 982, 982 1, 982 #1, Zeiss
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Leo DSM 982 SEM #2 (Nabity)
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Leo 2, Leo #2, 982 2, 982 #2, Nabity
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Amray 1830 SEM
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Amray, Amray SEM
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IPE PECVD
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PECVD, IPE PECVD
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CVC Sputter Deposition
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Sputterer, Sputter
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CHA Thermal Evaporator
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CHA, Thermal Evaporator
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CVC SC4500 Evaporator
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EBeam Evaporator, EGun Evaporator, EBeam, EGun
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Dual E-Gun Evaporator
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Dual EGun
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PlasmaTherm SSL720 RIE
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Grandson, New Cl2, SSL720
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PlasmaTherm PK1250 RIE [Cl]
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Old Man, PK1250
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PlasmaTherm SLR-770 ICP RIE
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SLR, Bosch, SLR 770, SLR-770, 770
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PlasmaTherm PT72 RIE [F]
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Jr, Jr., Release
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Teckniks CAIBE
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CAIBE
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PlasmaQuest ECR
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ECR
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MRC MIE
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MIE
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Applied Materials RIE [F]
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Applied Materials, Applied
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Ion Mill
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Ion Mill
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Branson Barrel Etcher
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Branson
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Polysilicon
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Poly, Poly Tube
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TFT Polysilicon
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TFT Poly, TFT Poly Tube
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Nitride
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Nitride, Nitride Tube, LPCVD Nitride, LPCVD Nitride Tube
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HCL Oxide
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Dry Oxide, Dry Oxide Tube, HCL Oxide Tube, HCL Oxide
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TCA Wet Oxide
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TCA, TCA Tube, Wet Oxide, Wet Oxide Tube
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TCA Anneal
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TCA Anneal, TCA Anneal Tube
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TCA Dry Oxide
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TCA Dry Oxide
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TFT MOS Clean
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TFT MOS Clean, TFT Clean
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MOS Clean
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MOS Clean, Clean
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Annealing
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Help!?!? I don't understand these tubes.
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LTO 410
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LTO, LTO Tube, VLTO, VLTO Tube
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Scanning Auger Microprobe
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Auger
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Topometrix AFM/STM
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Who would sign up for one of these?
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Keithley I-V
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IV, Probe, Probe Station, Test, Testing
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Topometrix AFM/STM
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AFM, STM, Topometrix
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Varian Ion Implanter
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Ion Implanter, Implanter
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AG Heatpulse RTA
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RTA, AG Heatpulse, AG Heatpulse RTA
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